US 12,183,592 B1
Method of manufacturing a ceramic structure with metal traces
Tobias Schaedler, Oak Park, CA (US); Kayleigh Porter, Los Angeles, CA (US); and Phuong Bui, Thousand Oaks, CA (US)
Assigned to HRL LABORATORIES, LLC, Malibu, CA (US)
Filed by HRL Laboratories, LLC, Malibu, CA (US)
Filed on Jul. 20, 2023, as Appl. No. 18/224,524.
Application 18/224,524 is a division of application No. 17/165,825, filed on Feb. 2, 2021, granted, now 11,756,799.
Claims priority of provisional application 62/970,076, filed on Feb. 4, 2020.
Int. Cl. H01L 21/48 (2006.01); H01L 23/13 (2006.01); H01L 23/15 (2006.01); H01L 23/498 (2006.01)
CPC H01L 21/4807 (2013.01) [H01L 21/4857 (2013.01); H01L 21/4867 (2013.01); H01L 23/15 (2013.01); H01L 23/49822 (2013.01); H01L 23/49838 (2013.01); H01L 23/13 (2013.01); H01L 23/49866 (2013.01); H01L 23/49883 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method for manufacturing an article, the method comprising:
forming a layer of a preceramic polymer resin on a surface of a partially-fabricated article;
selectively curing the layer in a first region of the surface after the forming of the layer of the preceramic polymer resin on the surface;
forming one or more patches of a slurry of metallic particles, in a second region of the surface, the second region being different from the first region; and
wherein after the forming of the layer of the preceramic polymer resin on the surface and after the forming of one or more patches of the slurry of metallic particles, the method further comprises performing pyrolysis on the partially-fabricated article in an inert atmosphere at one or more temperatures between 600° C. and 1000° C. for 10 minutes to 100 minutes after heating at a heating rate of between 0.5° C./min and 5° C./min.