US 12,181,493 B2
Compliant probes including dual independently operable probe contact elements including at least one flat extension spring, methods for making, and methods for using
Ming Ting Wu, San Jose, CA (US); and Garret R. Smalley, Newhall, CA (US)
Assigned to Microfabrica Inc., Van Nuys, CA (US)
Filed by Microfabrica Inc., Van Nuys, CA (US)
Filed on Aug. 29, 2022, as Appl. No. 17/898,446.
Application 17/898,446 is a continuation in part of application No. 17/854,756, filed on Jun. 30, 2022, granted, now 12,078,657.
Application 17/898,446 is a continuation in part of application No. 17/682,340, filed on Feb. 28, 2022, granted, now 11,906,549.
Application 17/898,446 is a continuation in part of application No. 17/532,959, filed on Nov. 22, 2021, abandoned.
Application 17/682,340 is a continuation of application No. 17/139,940, filed on Dec. 31, 2020, abandoned.
Application 17/532,959 is a continuation of application No. 16/666,377, filed on Oct. 28, 2019, abandoned.
Claims priority of provisional application 63/354,665, filed on Jun. 22, 2022.
Claims priority of provisional application 63/337,579, filed on May 2, 2022.
Claims priority of provisional application 63/238,209, filed on Aug. 29, 2021.
Claims priority of provisional application 63/217,721, filed on Jul. 1, 2021.
Claims priority of provisional application 63/217,265, filed on Jun. 30, 2021.
Claims priority of provisional application 62/961,675, filed on Jan. 15, 2020.
Claims priority of provisional application 62/961,678, filed on Jan. 15, 2020.
Claims priority of provisional application 62/961,672, filed on Jan. 15, 2020.
Claims priority of provisional application 62/956,124, filed on Dec. 31, 2019.
Claims priority of provisional application 62/956,122, filed on Dec. 31, 2019.
Claims priority of provisional application 62/956,016, filed on Dec. 31, 2019.
Claims priority of provisional application 62/756,574, filed on Nov. 6, 2018.
Claims priority of provisional application 62/751,532, filed on Oct. 26, 2018.
Prior Publication US 2024/0094250 A1, Mar. 21, 2024
Int. Cl. G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 3/00 (2006.01)
CPC G01R 1/06722 (2013.01) [G01R 1/06738 (2013.01); G01R 1/0735 (2013.01); G01R 3/00 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A probe, comprising:
(a) a first tip arm connecting directly or indirectly to an attachment region of a first tip for making electrical contact to a first electrical circuit element;
(b) a second tip arm connecting directly or indirectly to an attachment region of a second tip;
(c) a compliant structure comprising at least one spring, wherein a first region of the compliant structure directly or indirectly joins the first tip arm and a second region of the compliant structure directly or indirectly joins the second tip arm,
wherein a relative displacement of the first and second tip arms results in elastic movement of the at least one spring of the compliant structure;
(d) a first frame structure comprising at least one first lateral element, a second lateral element and a first pair of longitudinal elements extending from the first lateral element to the second lateral element, the first lateral element being connected directly or indirectly to the first tip arm and the second lateral element being connected to the first region of the compliant structure; and
(e) a second frame structure comprising at least one third lateral element, a fourth lateral element and a second pair of longitudinal elements extending from the third lateral element to the fourth lateral element, the third lateral element being connected to the second region of the compliant structure and the fourth lateral element being connected directly or indirectly to the second tip arm,
wherein the first and second frame structures are elastically joined to one another by the at least one spring of the compliant structure and allowed to slide relative to one another by movement of the first and second pair of longitudinal elements.