US 12,176,884 B2
Surface acoustic wave resonator, filter, manufacturing method thereof, and communication device
Gongbin Tang, Guangdong (CN)
Assigned to Newsonic Technologies, Shenzhen (CN)
Filed by Newsonic Technologies, Guangdong (CN)
Filed on Feb. 18, 2022, as Appl. No. 17/675,286.
Prior Publication US 2022/0173718 A1, Jun. 2, 2022
Int. Cl. H03H 9/25 (2006.01); H03H 3/08 (2006.01); H03H 9/64 (2006.01)
CPC H03H 9/25 (2013.01) [H03H 3/08 (2013.01); H03H 9/64 (2013.01); H03H 9/6483 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A surface acoustic wave resonator, comprising:
a piezoelectric material layer;
an interdigital transducer located at a side of the piezoelectric material layer; and
a dielectric layer,
wherein the dielectric layer is located between the interdigital transducer and the piezoelectric material layer, and
a thickness of the dielectric layer ranges from 5 nm to 20 nm.
 
12. A filter comprising:
a series branch, comprising M series resonators; and
N parallel branches, each of the parallel branches comprising at least one parallel resonator,
wherein the M series resonators in the series branch are arranged in series, a first end of each of the parallel branches is grounded, a second end of each of the parallel branches is connected with the series branch, M and N are positive integers greater than or equal to 2,
at least one of the M series resonators and parallel resonators in the N parallel branches adopts the surface acoustic wave resonator according to claim 1.