US 12,176,384 B2
Methods of parallel transfer of micro-devices using treatment
Manivannan Thothadri, Mountain View, CA (US); and Arvinder Chadha, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Aug. 16, 2023, as Appl. No. 18/450,963.
Application 18/450,963 is a division of application No. 17/479,985, filed on Sep. 20, 2021, granted, now 11,776,989.
Application 16/805,378 is a division of application No. 16/270,235, filed on Feb. 7, 2019, granted, now 10,580,826, issued on Mar. 3, 2020.
Application 16/270,235 is a division of application No. 15/619,226, filed on Jun. 9, 2017, granted, now 10,217,793, issued on Feb. 26, 2019.
Application 17/479,985 is a continuation in part of application No. 16/805,378, filed on Feb. 28, 2020, granted, now 11,127,781, issued on Sep. 21, 2021.
Claims priority of provisional application 62/348,691, filed on Jun. 10, 2016.
Prior Publication US 2023/0395645 A1, Dec. 7, 2023
Int. Cl. H01L 27/15 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 25/075 (2006.01); H01L 33/00 (2010.01); H01L 33/60 (2010.01); H05K 3/00 (2006.01); H05K 3/30 (2006.01); H05K 13/00 (2006.01); H05K 13/04 (2006.01); H01L 33/20 (2010.01); H01L 33/48 (2010.01)
CPC H01L 27/156 (2013.01) [H01L 21/67144 (2013.01); H01L 21/6835 (2013.01); H01L 25/0753 (2013.01); H01L 33/0095 (2013.01); H01L 33/60 (2013.01); H05K 3/0026 (2013.01); H05K 3/305 (2013.01); H05K 13/0015 (2013.01); H05K 13/0069 (2013.01); H05K 13/0469 (2013.01); H01L 33/20 (2013.01); H01L 33/48 (2013.01); H01L 2221/68322 (2013.01); H01L 2221/68368 (2013.01); H01L 2221/68381 (2013.01); H01L 2933/0033 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An apparatus for transferring micro-devices, the apparatus comprising:
a first body having a first surface to receive a first adhesive layer;
a second body having a second surface to receive a second adhesive layer;
one or more actuators configured to provide relative motion between the first body and the second body;
a first illumination system configured to selectively expose the first adhesive layer to a light having a first wavelength; and
a second illumination system configured to expose the first adhesive layer to a light having a different second wavelength; and
a controller configured to
cause the one or more actuators to create relative motion such that a plurality of micro-devices attached to the first body by the first adhesive layer contact the second adhesive layer,
cause the first illumination system to selectively expose the first adhesive layer to create a treated portion corresponding to one or more micro-devices from the plurality of micro-devices and an untreated portion corresponding to one or more micro-devices from the plurality of micro-devices,
cause the second illumination system to expose the first adhesive layer in a region that overlaps at least some of the treated portion and at least some of the untreated portion to create a neutralized portion while the at least some of the treated portion retains adhesiveness; and
cause the one or more actuators to create relative motion such that the first body and the second body are moved away from each other and one or more micro-devices corresponding to the treated portion of the first adhesive layer remain attached to the first surface and one or more micro-devices corresponding to the neutralized portion are attached to the second surface and are separated from the first surface.