US 12,176,361 B2
Electromagnetic radiation detection method
Kun-Huei Lin, Hsinchu (TW); Yun-Wei Cheng, Hsinchu (TW); Chun-Hao Chou, Hsinchu (TW); Kuo-Cheng Lee, Hsinchu (TW); and Chun-Wei Chia, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed on Jul. 22, 2022, as Appl. No. 17/871,088.
Application 17/871,088 is a division of application No. 16/850,524, filed on Apr. 16, 2020, granted, now 11,521,997.
Prior Publication US 2022/0359590 A1, Nov. 10, 2022
Int. Cl. H01L 27/146 (2006.01); G01R 29/08 (2006.01); H01L 27/02 (2006.01); H01L 29/423 (2006.01); H04N 25/00 (2023.01)
CPC H01L 27/14614 (2013.01) [G01R 29/08 (2013.01); H01L 27/0203 (2013.01); H01L 27/14603 (2013.01); H01L 27/14612 (2013.01); H01L 27/14636 (2013.01); H01L 27/14643 (2013.01); H01L 29/4236 (2013.01); H01L 27/14605 (2013.01); H01L 2924/13081 (2013.01); H04N 25/00 (2023.01)] 20 Claims
OG exemplary drawing
 
1. A method of detecting electromagnetic radiation, the method comprising:
illuminating a photodiode of a pixel sensor with electromagnetic radiation;
using vertical gate structures of a transfer transistor to couple a cathode of the photodiode to an internal node of the pixel sensor, thereby generating an internal node voltage level; and
generating an output voltage level of the pixel sensor based on the internal node voltage level.