US 12,176,282 B2
Manufacturing method of semiconductor package
Chung-Ming Weng, Hsinchu (TW); Chen-Hua Yu, Hsinchu (TW); Chung-Shi Liu, Hsinchu (TW); Hao-Yi Tsai, Hsinchu (TW); Cheng-Chieh Hsieh, Tainan (TW); Hung-Yi Kuo, Taipei (TW); Tsung-Yuan Yu, Taipei (TW); Hua-Kuei Lin, Hsinchu (TW); Hsiu-Jen Lin, Hsinchu (TW); Ming-Che Ho, Hsinchu County (TW); Yu-Hsiang Hu, Tainan (TW); Chewn-Pu Jou, Hsinchu (TW); and Cheng-Tse Tang, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Mar. 27, 2023, as Appl. No. 18/190,935.
Application 18/190,935 is a division of application No. 17/377,395, filed on Jul. 16, 2021, granted, now 11,640,935.
Prior Publication US 2023/0245967 A1, Aug. 3, 2023
Int. Cl. H01L 23/498 (2006.01); G02B 6/42 (2006.01); H01L 21/768 (2006.01); H01L 23/00 (2006.01)
CPC H01L 23/49838 (2013.01) [G02B 6/4202 (2013.01); G02B 6/4274 (2013.01); H01L 21/7684 (2013.01); H01L 23/49822 (2013.01); H01L 24/16 (2013.01); H01L 2224/16055 (2013.01); H01L 2224/16112 (2013.01); H01L 2224/16148 (2013.01); H01L 2924/19033 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A manufacturing method of a semiconductor package, comprising:
forming a supporting layer over a redistribution structure;
performing a first planarization process over the supporting layer;
forming a lower dielectric layer over the supporting layer, wherein the lower dielectric layer comprises a concave revealing a device mounting region of the supporting layer;
forming a first sacrificial layer over the supporting layer, wherein the sacrificial layer filling the concave;
performing a second planarization process over the lower dielectric layer and the first sacrificial layer;
providing a transition waveguide over the lower dielectric layer;
removing the first sacrificial layer;
mounting a semiconductor device over the device mounting region, wherein the semiconductor device comprises a device waveguide is optically coupled to the transition waveguide.