US 12,176,232 B2
Stocker system for wafer cassette
Guancyun Li, Hsinchu (TW); Ching-Jung Chang, Hsinchu (TW); Chi-Feng Tung, Hsinchu (TW); and Hsiang Yin Shen, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Jun. 26, 2023, as Appl. No. 18/341,496.
Application 18/341,496 is a division of application No. 16/808,166, filed on Mar. 3, 2020, granted, now 11,735,451.
Claims priority of provisional application 62/907,441, filed on Sep. 27, 2019.
Prior Publication US 2023/0335422 A1, Oct. 19, 2023
Int. Cl. H01L 21/67 (2006.01); B65D 81/02 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67733 (2013.01) [B65D 81/022 (2013.01); H01L 21/67271 (2013.01); H01L 21/67706 (2013.01); H01L 21/67724 (2013.01); H01L 21/6773 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A stocker system, comprising:
a multi-cassette rack configured to, in operation, store at least two different types of wafer cassettes;
one or more multi-cassette ports within the multi-cassette rack,
each respective multi-cassette port including:
a first end and a second end opposite to the first end;
a first side and a second side opposite to the first side,
the first side and the second side extend from the first end to the second end;
a first guide arm attached to the multi-cassette rack, the first guide arm being positioned at the first side; and
a second guide arm attached to the rack, the second guide arm parallel to the first guide arm and the second guide arm being positioned at the second side,
wherein the first guide arm and the second guide arm are spaced apart from each other to accommodate at least two different types of wafer cassettes,
the two different types of wafer cassettes having a different size and shape relative to each other.