US 12,176,228 B2
High density semiconductor storage system
Rong Syuan Fan, Hsinchu (TW); Ching-Jung Chang, Hsinchu (TW); Chi-Feng Tung, Hsinchu (TW); and Hsiang Yin Shen, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Apr. 20, 2022, as Appl. No. 17/725,120.
Prior Publication US 2023/0343621 A1, Oct. 26, 2023
Int. Cl. H01L 21/673 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67309 (2013.01) [H01L 21/6719 (2013.01); H01L 21/67346 (2013.01); H01L 21/67736 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A manufacturing system, comprising:
a stocker including:
a housing;
a storage compartment within the housing and delimited by the housing;
a plurality of shelves within the storage compartment;
a plurality of storage carriers on the plurality of shelves, each storage carrier on a corresponding one of the plurality of shelves, and each storage carrier including:
a first surface that contacts the corresponding one of the plurality of shelves;
a second surface opposite from the first surface and facing away from the corresponding one of the plurality of shelves; and
a first dimension extends from the first surface to the second surface; and
a plurality of gaps each having a second dimension extending from a corresponding one of the second surfaces of one of the plurality storage carriers to an adjacent one of the plurality of shelves, the second dimension being less than the first dimension;
a forking robot including:
a plus-shape support structure including a plurality of ends, the plus-shape support structure configured to, in operation, support a corresponding one of the plurality of storage carriers when present on the plus-shape support structure;
a plurality of boundary walls at the plurality of ends configured to, in operation, maintain a position of the corresponding one of the plurality of storage carriers when on the plus-shape support structure; and
a hook at a first end of the plurality of ends, the hook configured to, in operation, engage a corresponding one of the plurality of shelves.