US 12,176,227 B2
State determination device, state determination method, and computer-readable recording medium
Junnosuke Maki, Koshi (JP); Masaomi Toyonaga, Koshi (JP); Atsushi Ohta, Sapporo (JP); Motoi Okada, Sapporo (JP); Takuro Tsutsui, Sapporo (JP); Kei Sano, Sapporo (JP); and Mistsuteru Yano, Koshi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Appl. No. 17/598,077
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
PCT Filed Mar. 18, 2020, PCT No. PCT/JP2020/012127
§ 371(c)(1), (2) Date Sep. 24, 2021,
PCT Pub. No. WO2020/196195, PCT Pub. Date Oct. 1, 2020.
Claims priority of application No. 2019-058391 (JP), filed on Mar. 26, 2019.
Prior Publication US 2022/0223443 A1, Jul. 14, 2022
Int. Cl. H01L 21/67 (2006.01); G01L 5/00 (2006.01); G05B 19/4155 (2006.01)
CPC H01L 21/67276 (2013.01) [G01L 5/00 (2013.01); G05B 19/4155 (2013.01); G05B 2219/45031 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A state determination device for determining a state of a drive mechanism configured to operate while holding a substrate in a substrate processing apparatus, the state determination device comprising:
an acquisition part configured to acquire operation data for the drive mechanism;
a storage part configured to store a monitoring model for the drive mechanism generated by executing machine learning using an auto-encoder based on normal operation data for the drive mechanism; and
a first determination part configured to determine the state of the drive mechanism based on first output data obtained by inputting, to the monitoring model, evaluation data that is derived from the operation data acquired by the acquisition part when the drive mechanism is being evaluated, and configured to execute:
a process of acquiring a permissible error based on a first error between the normal operation data and a second output data obtained by inputting the normal operation data to the monitoring model;
a process of acquiring a first degree of deviation from the permissible error by comparing a second error between the evaluation data and the first output data with the permissible error; and
a process of determining the state of the drive mechanism based on the first degree of deviation,
wherein determining the state of the drive mechanism based on the first degree of deviation includes determining based on whether or not the first degree of deviation exceeds a predetermined threshold, and
wherein the threshold is a value obtained by 3σ2 when a parameter σ2 is a standard deviation of a second degree of deviation from the permissible error, which is obtained based on comparison between the first error and the permissible error.