CPC H01L 21/0259 (2013.01) [H01L 21/0257 (2013.01); H01L 29/7436 (2013.01); G11C 11/39 (2013.01); G11C 17/06 (2013.01)] | 6 Claims |
1. A multi-layer semiconductor memory cell array, comprising:
a semiconductor substrate;
a first m by n array of semiconductor memory cells extending in a first x direction-y direction plane and electrically connected in a x direction to first terminal lines;
at least one second m by n array of the semiconductor memory cells extending in the a second x direction-y direction plane and electrically connected in the x direction to the first terminal lines, the at least one second m by n array of the semiconductor memory cells being stacked vertically above the first m by n array of the semiconductor memory cells; and
each of the semiconductor memory cells comprising only a single crystal silicon, and wherein m and n are integers.
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