US 12,176,199 B2
Ionization device and mass spectrometer
Yessica Brachthaeuser, Cologne (DE); Thorsten Benter, Haan (DE); Marco Thinius, Wuppertal (DE); and Michel Aliman, Oberkochen (DE)
Assigned to Leybold GmbH, Cologne (DE)
Appl. No. 17/616,495
Filed by Leybold GmbH, Cologne (DE)
PCT Filed May 11, 2020, PCT No. PCT/EP2020/063070
§ 371(c)(1), (2) Date Dec. 3, 2021,
PCT Pub. No. WO2020/244889, PCT Pub. Date Dec. 10, 2020.
Claims priority of application No. 10 2019 208 278.5 (DE), filed on Jun. 6, 2019.
Prior Publication US 2022/0230865 A1, Jul. 21, 2022
Int. Cl. H01J 49/24 (2006.01); H01J 27/20 (2006.01); H01J 49/06 (2006.01); H01J 49/14 (2006.01); H01J 49/02 (2006.01); H01J 49/26 (2006.01)
CPC H01J 49/147 (2013.01) [H01J 27/205 (2013.01); H01J 49/068 (2013.01); H01J 49/24 (2013.01); H01J 49/025 (2013.01); H01J 49/26 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An ionization device, comprising:
an ionization space formed in a chamber,
an inlet system for supplying a gas to be ionized to the ionization space,
an electron source having at least one filament for supply of an electron beam to the ionization space, and
an outlet system for letting the ionized gas out of the ionization space,
characterized in that
an electron optics comprising at least two electrodes is installed between the filament and the ionization space wherein the electron optics are configured to use one of the at least two electrodes to measure an emission current of the filament.