US 12,176,179 B2
Method, device and system for reducing off-axial aberration in electron microscopy
Maarten Bischoff, Uden (NL); Peter Christiaan Tiemeijer, Eindhoven (NL); Tjerk Gerrit Spanjer, Eindhoven (NL); and Stan Johan Pieter Konings, Breda (NL)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Sep. 26, 2023, as Appl. No. 18/474,982.
Application 18/474,982 is a division of application No. 18/159,261, filed on Jan. 25, 2023, granted, now 11,817,290.
Application 18/159,261 is a continuation of application No. 17/253,097, granted, now 11,587,759, issued on Feb. 21, 2023, previously published as PCT/US2018/066790, filed on Dec. 20, 2018.
Claims priority of application No. 17210806 (EP), filed on Dec. 28, 2017.
Prior Publication US 2024/0029993 A1, Jan. 25, 2024
Int. Cl. H01J 37/153 (2006.01); H01J 37/147 (2006.01); H01J 37/20 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/153 (2013.01) [H01J 37/1478 (2013.01); H01J 37/20 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); H01J 2237/1516 (2013.01); H01J 2237/1534 (2013.01); H01J 2237/202 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2802 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method for reducing throughput time in a sample image acquisition session in transmission electron microscopy comprising
providing an electron microscope comprising a sample component, a beam generator, an adjusting component, and a filtering component;
securing a sample by using the sample component;
generating an electron beam by using the beam generator;
generating an image beam by directing the beam to the sample component;
adjusting at least one of the beam and the image beam by using the adjusting component to obtain at least one modified image beam, wherein the adjusting is performed in such a way, that off-axial aberration of the modified image beam is minimized;
filtering the modified image beam via the filtering component to reduce resolution-deteriorating effect of chromatic aberration on the modified image beam resulting from the adjusting of the at least one of the beam and the image beam.