US 12,176,177 B2
Ion beam chamber fluid delivery apparatus and method and ion beam etcher using same
Christopher Pawlowicz, Ottawa (CA); Alexander Sorkin, Nepean (CA); Trevor Jason French, Carleton Place (CA); Ian Jones, Ottawa (CA); and Paul Gagnon, Maberly (CA)
Assigned to TECHINSIGHTS INC., Ottawa (CA)
Filed by TECHINSIGHTS INC., Ottawa (CA)
Filed on Jun. 6, 2022, as Appl. No. 17/805,663.
Claims priority of application No. CA 3121768 (CA), filed on Jun. 9, 2021.
Prior Publication US 2022/0399179 A1, Dec. 15, 2022
Int. Cl. H01J 37/08 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/08 (2013.01) [H01J 37/3244 (2013.01); H01J 37/32743 (2013.01); H01J 2237/3174 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An ion beam chamber fluid delivery system for delivering a fluid onto a substrate in an ion beam system during operation, said ion beam chamber fluid delivery system comprising:
a chamber comprising an ion beam gun oriented so as to cause ions to impinge the substrate, said chamber further comprising a sealable opening for receiving the substrate and said chamber having a fluid delivery conduit therein for delivering the fluid into the chamber;
a transferable stage for holding the substrate, the transferable stage further configured to move between an operating position and a payload position during non-operation, said payload position for receiving and removing said substrate via said sealable opening; and
a fluid delivery nozzle being in a fixed location relative to the transferable stage, at least during operation, with an outlet position that is configured to deliver a fluid to a predetermined location on said transferable stage, the fluid delivery nozzle being in fluid communication with the fluid delivery conduit via a nozzle conduit connector that permits the fluid delivery nozzle to remain substantially fixed relative to the transferable stage when the transferable stage is in the operating position;
wherein the fluid delivery conduit comprises a conduit engager that is removably and sealably engageable with said nozzle conduit connector when said transferable stage is moved into said operating position from said payload position.