US 12,174,549 B2
Liquid amount measuring method and computer-readable recording medium
Yuichiro Kunugimoto, Koshi (JP); Shota Ueyama, Koshi (JP); Akihiro Teramoto, Koshi (JP); Yuta Nishiyama, Koshi (JP); and Shinichi Hatakeyama, Koshi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Jun. 23, 2023, as Appl. No. 18/213,785.
Application 18/213,785 is a division of application No. 17/522,050, filed on Nov. 9, 2021, granted, now 11,726,409.
Claims priority of application No. 2020-190281 (JP), filed on Nov. 16, 2020.
Prior Publication US 2023/0418166 A1, Dec. 28, 2023
Int. Cl. G01F 9/00 (2006.01); B08B 3/02 (2006.01); B08B 13/00 (2006.01); G01G 21/22 (2006.01); G03F 7/00 (2006.01); G03F 7/16 (2006.01)
CPC G03F 7/70491 (2013.01) [B08B 3/02 (2013.01); B08B 13/00 (2013.01); G01F 9/003 (2013.01); G01G 21/22 (2013.01); G03F 7/16 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A liquid amount measuring method comprising:
a first step of placing a measurement device on a carrier support of a placement stage, wherein the carrier support is configured to place thereon a carrier configured to accommodate a substrate;
a second step of transferring a measuring jig in the measurement device from the measurement device to a liquid processing unit after the first step;
a third step of supplying a processing liquid from a supplier having a nozzle of the liquid processing unit to the measuring jig after the second step to store the processing liquid in the measuring jig;
a fourth step of, after the third step, transferring the measuring jig from the liquid processing unit to the measurement device, measuring a weight of the measuring jig, in which the processing liquid is stored, in the measurement device, and storing the measured weight in a controller; and
a fifth step of calculating an ejection amount of the processing liquid based on the weight stored in the controller after the fourth step,
wherein the measuring jig comprises:
a base member having a size equal to a size of the substrate;
a lid member provided with a through-hole and placed on the base member; and
a plurality of wall members disposed between the base member and the lid member to join the base member and the lid member,
wherein, when viewed from a direction in which the base member and the lid member are arranged, the plurality of wall members are arranged to form an annular shape as a whole to surround the through-hole and are separated from each other, and
wherein the third step includes ejecting the processing liquid from the supplier to the base member through the through-hole.