US 12,174,528 B2
Storage environment monitoring system and methods of operation
Chen-Wei Lu, Hsinchu (TW); Chuan Wei Lin, Hsinchu (TW); Chun-Hau Chen, Hsinchu (TW); Kuan Yu Lai, Hsinchu (TW); Fu-Hsien Li, Hsinchu (TW); Chi-Feng Tung, Hsinchu (TW); and Hsiang Yin Shen, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Mar. 26, 2021, as Appl. No. 17/214,367.
Prior Publication US 2022/0308442 A1, Sep. 29, 2022
Int. Cl. G05B 19/418 (2006.01); G03F 1/66 (2012.01); G03F 1/84 (2012.01); G03F 7/00 (2006.01); G06N 20/00 (2019.01)
CPC G03F 1/66 (2013.01) [G03F 1/84 (2013.01); G03F 7/70741 (2013.01); G03F 7/70858 (2013.01); G05B 19/4184 (2013.01); G05B 19/4189 (2013.01); G06N 20/00 (2019.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
determining, by an environmental monitoring platform, to dispatch a storage environment monitoring device to a reticle storage system to perform one or more environmental measurements of one or more storage areas of a plurality of storage areas of the reticle storage system;
transmitting, by the environmental monitoring platform and based on determining to dispatch the storage environment monitoring device, a first signal to a reticle carrier transport system to retrieve the storage environment monitoring device from a charging station;
transmitting, by the environmental monitoring platform and based on determining that the reticle carrier transport system has retrieved the storage environment monitoring device, a second signal to the reticle carrier transport system to transport the storage environment monitoring device to a staging area of the reticle storage system;
transmitting, by the environmental monitoring platform and based on determining that the storage environment monitoring device has been transported to the staging area, a third signal to a reticle carrier stocker to transport the storage environment monitoring device to a first storage area of the plurality of storage areas to perform the one or more environmental measurements of the first storage area;
receiving, from the storage environment monitoring device, an indication of results of the one or more environmental measurements;
determining, using a machine learning model and based on the results, that one or more environmental parameters of the first storage area are estimated to satisfy one or more thresholds associated with one or more abnormal storage environment conditions of the first storage area;
performing, based on determining that one or more environmental parameters of the first storage area are estimated to satisfy the one or more thresholds, one or more actions associated with the first storage area,
wherein performing the one or more actions comprises one or more of:
transmitting a fourth signal to the reticle carrier stocker to transport the storage environment monitoring device to a second storage area of the plurality of storage areas, or
transmitting a fifth signal to the reticle carrier stocker to automatically deactivate or lock only the first storage area so that the first storage area is not used until the one or more abnormal storage environment conditions of the first storage area are rectified; and
updating the machine learning model based on one or more of:
the results of the one or more environmental measurements, and historical results of one or more historical environmental measurements associated with the reticle storage system, or
outcomes of the one or more actions, and historical outcomes of one or more historical actions.