US 12,174,510 B2
Optical modulation element
Shinji Iwatsuka, Tokyo (JP); Kenji Endou, Tokyo (JP); and Hiroki Hara, Tokyo (JP)
Assigned to TDK Corporation, Tokyo (JP)
Appl. No. 17/797,199
Filed by TDK Corporation, Tokyo (JP)
PCT Filed Jan. 20, 2021, PCT No. PCT/JP2021/001823
§ 371(c)(1), (2) Date Aug. 3, 2022,
PCT Pub. No. WO2021/161745, PCT Pub. Date Aug. 19, 2021.
Claims priority of application No. 2020-020814 (JP), filed on Feb. 10, 2020.
Prior Publication US 2023/0059850 A1, Feb. 23, 2023
Int. Cl. G02F 1/225 (2006.01); G02F 1/035 (2006.01); G02F 1/21 (2006.01)
CPC G02F 1/225 (2013.01) [G02F 1/035 (2013.01); G02F 1/212 (2021.01); G02F 2201/12 (2013.01)] 28 Claims
OG exemplary drawing
 
1. An optical modulation element comprising:
a substrate; and
at least one interaction part provided on the substrate, wherein
the interaction part includes first and second optical waveguides formed adjacent to each other on the substrate and first and second signal electrodes provided so as to oppose the first and second optical waveguides respectively and to which differential signals are applied,
no ground electrode is provided in a nearby region of the interaction part,
a ground electrode is provided in a vicinity of at least one of an input part and a terminal part electrically connected to each of the first and second signal electrodes,
the input part has a first signal electrode pad electrically connected to one end of the first signal electrode and a second signal electrode pad electrically connected to one end of the second signal electrode,
the ground electrode includes a first ground electrode pad adjacent to the first signal electrode pad and a second ground electrode pad adjacent to the second signal electrode pad, and
the first and second ground electrode pads are electrically connected to each other through a first short-circuit pattern provided on the substrate.