CPC G01R 31/2853 (2013.01) [G01R 31/70 (2020.01); H01L 24/10 (2013.01); H01L 24/80 (2013.01)] | 24 Claims |
1. A bonded structure comprising:
a semiconductor element with first circuitry;
a protective element directly bonded to the semiconductor element along a bond interface without an adhesive, the protective element comprising an obstructive material disposed over the first circuitry; and
a detection circuit capable of detecting external access to the protective element.
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