| CPC G01R 31/2846 (2013.01) [H01L 22/12 (2013.01)] | 19 Claims |
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1. A system which presents a recipe defining an inspection operation executed by a semiconductor inspection apparatus or information related to the recipe, the system comprising:
the semiconductor inspection apparatus; and
a computer system which infers the recipe which becomes a cause of an error which occurs in the semiconductor inspection apparatus,
wherein the computer system includes a learner which learns, by machine learning, a correspondence between the recipe used when the semiconductor inspection apparatus executes the inspection operation and the error which originates from the recipe,
wherein the computer system introduces a new recipe into the learner after the learner completes the machine learning, and acquires, as the output of the learner, an inference result as to whether the error occurs when the semiconductor inspection apparatus uses the new recipe,
wherein when acquiring, from the learner, the inference result indicating that the error occurs by the new recipe, the computer system repeats correction of the new recipe and re-introduction of a corrected new recipe into the learner until the inference result indicating that the error does not occur is acquired, and
wherein the computer system presents that the recipe or the information related to the recipe acquired by the repetition is to be used by the semiconductor inspection apparatus.
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