US 12,174,243 B2
Probe assembly, system and method for testing rf device of phased array antenna
Yu-Jiu Wang, Hsinchu (TW); Hao-Chung Chou, Hsinchu (TW); Yue Ming Wu, Hsinchu (TW); and Ta-Shun Chu, Hsinchu (TW)
Assigned to TRON FUTURE TECH INC., Hsinchu (TW)
Filed by TRON FUTURE TECH INC., Hsinchu (TW)
Filed on Dec. 14, 2022, as Appl. No. 18/065,867.
Prior Publication US 2024/0201245 A1, Jun. 20, 2024
Int. Cl. G01R 31/20 (2006.01); G01R 1/067 (2006.01); G01R 31/28 (2006.01)
CPC G01R 31/2822 (2013.01) [G01R 1/06772 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for testing a first radio-frequency (RF) device, comprising:
receiving the first RF device having a pair of differential signal ports including a first signal port and a second signal port for transmitting RF signals;
arranging a first probe needle of a probe assembly to couple to the first signal port, wherein the probe assembly further comprises:
a second probe needle configured to form a pair of differential probe needles with the first probe needle; and
an active device comprising a first input terminal, a second input terminal and an output terminal, the first input terminal and the second input terminal coupled to the first probe needle and the second probe needle, respectively;
arranging the second probe needle to couple to the second signal port;
arranging a testing tool to couple to the output terminal for testing the first RF device through the probe assembly; and
arranging a first terminal and a second terminal of a first resistive element to couple to the first probe needle and the second probe needle, respectively, to make a first input impedance looking into the probe assembly from the testing tool substantially equal to a second input impedance looking into the testing tool from the probe assembly.