CPC G01F 23/268 (2013.01) [C04B 37/025 (2013.01); G01F 23/266 (2013.01)] | 7 Claims |
1. A sensor having an exposed detection surface, comprising:
a first ceramic layer;
an electrode layer formed on a surface of the first ceramic layer; and
a second ceramic layer having a surface as the exposed detection surface, covering the first ceramic layer and the electrode layer, the second ceramic layer being thinner than the first ceramic layer and having a thickness from 1 μm to 10 μm as a single layer between the detection surface and the electrode layer, the electrode layer being disposed directly between the first ceramic layer and the second ceramic layer,
wherein in a cross section of the first ceramic layer, the electrode layer, and the second ceramic layer along a laminating direction, T1 and T2 satisfy Equation (1) below, where T1 denotes a least thickness in the second ceramic layer on the electrode on the first ceramic layer, and T2 denotes an average thickness of the second ceramic layer on the electrode on the first ceramic layer:
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