US 12,174,005 B2
Metrology system with position and orientation tracking utilizing light beams
Joseph Daniel Tobiason, Bothell, WA (US); Michael Nahum, Seattle, WA (US); Norman Laman, Kenmore, WA (US); and Ted Staton Cook, Kirkland, WA (US)
Assigned to Mitutoyo Corporation, Kanagawa-ken (JP)
Filed by Mitutoyo Corporation, Kanagawa-ken (JP)
Filed on Dec. 27, 2021, as Appl. No. 17/562,704.
Prior Publication US 2023/0204340 A1, Jun. 29, 2023
Int. Cl. G01B 11/00 (2006.01); G01B 11/14 (2006.01)
CPC G01B 11/005 (2013.01) [G01B 11/14 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A metrology system for use with a movement system that moves an end tool,
the movement system comprising:
a movable configuration comprising an end tool mounting configuration that an end tool is configured to mount to; and
a motion control system configured to control an end tool position and orientation, based at least in part on controlling the movable configuration so as to move at least a portion of an end tool that is mounted to the end tool mounting configuration within a movement volume,
the metrology system comprising:
a sensor configuration comprising a plurality of light beam sensors;
a light beam source configuration that is configured to direct light beams to the light beam sensors of the sensor configuration, wherein:
one of the light beam source configuration or the sensor configuration is configured to be coupled to at least one of the end tool or the end tool mounting configuration; and
the light beams that are directed to the light beam sensors are configured to cause the light beam sensors to produce corresponding measurement signals; and
a processing portion configured to process the measurement signals from the light beam sensors of the sensor configuration, wherein the measurement signals from the light beam sensors indicate a position and orientation of the end tool.