US 11,855,604 B2
Piezoelectric microelectromechanical resonator device and corresponding manufacturing process
Federico Vercesi, Milan (IT); Lorenzo Corso, Ruginello (IT); Giorgio Allegato, Monza (IT); and Gabriele Gattere, Castronno (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed on Sep. 24, 2020, as Appl. No. 17/031,181.
Claims priority of application No. 102019000017552 (IT), filed on Sep. 30, 2019.
Prior Publication US 2021/0099154 A1, Apr. 1, 2021
Int. Cl. H03H 9/10 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); H03H 3/02 (2006.01); H03H 9/17 (2006.01); H03H 9/15 (2006.01)
CPC H03H 9/1021 (2013.01) [B81B 7/0038 (2013.01); B81C 1/00285 (2013.01); H03H 3/02 (2013.01); H03H 9/17 (2013.01); B81B 2201/0271 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/04 (2013.01); B81B 2207/07 (2013.01); B81C 2201/0105 (2013.01); B81C 2203/0118 (2013.01); H03H 2003/022 (2013.01); H03H 2003/027 (2013.01); H03H 2009/155 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A micro-electro-mechanical system resonator device, comprising:
a main body having a first layer with a first surface and a second layer with a second surface opposite to the first surface along an axis, the second layer having an internal cavity facing the first layer along the axis, the first layer including a mobile element overlapping the internal cavity and suspended in a cantilever fashion relative to the internal cavity;
a bonding element;
a cap having a first surface and a second surface opposite to one another along the axis, and the first surface of the cap bonded to the first surface of the main body by the bonding element, the cap including a housing cavity overlapping the internal cavity, the mobile element suspended in the cantilever fashion relative to the housing cavity; and
a piezoelectric resonator structure including:
the mobile element, configured as a bottom electrode;
a piezoelectric region of a piezoelectric material, arranged on the mobile element at the first surface of the main body; and
a top electrode arranged on the piezoelectric region.