CPC H01L 23/5286 (2013.01) [H01L 23/5226 (2013.01); H01L 29/2003 (2013.01); H01L 29/41725 (2013.01); H01L 29/42316 (2013.01)] | 20 Claims |
1. An electronic device, comprising:
a structural body including a substrate and a layer of gallium nitride on the substrate;
a source terminal, a drain terminal, and a gate terminal on top of and in contact with a top surface of the layer of gallium nitride;
a plurality of source metal strips coupled to the source terminal, the plurality of source metal strips including a first source metal strip and a second source metal strip;
a plurality of drain metal strips coupled to the drain terminal, the plurality of drain metal strips including a first drain metal strip and a second drain metal strip, the first drain metal strip being between the first and second source metal strips, the first drain metal strip having a first end spaced from a second end along a first direction, the first end of the first drain metal strip being aligned with a central region of the first source metal strip along a second direction that is transverse to the first direction;
a trapezoidal source metal bus on the plurality of source metal strips and on the plurality of drain metal strips; and
a trapezoidal drain metal bus spaced from the source metal bus, the drain metal bus being on the plurality of source metal strips and on the plurality of drain metal strips;
an insulating layer that separates the source metal bus from the drain metal bus:
a first conductive pad electrically coupled to the source metal bus; and
a second conductive pad electrically coupled to the drain metal bus.
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