US 11,854,977 B2
GAN-based, lateral-conduction, electronic device with improved metallic layers layout
Santo Alessandro Smerzi, Catania (IT); Maria Concetta Nicotra, Catania (IT); and Ferdinando Iucolano, Gravina di Catania (IT)
Assigned to STMICROELECTRONICS S.R.L., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.R.L., Agrate Brianza (IT)
Filed on Nov. 6, 2019, as Appl. No. 16/676,371.
Claims priority of application No. 102018000010195 (IT), filed on Nov. 9, 2018.
Prior Publication US 2020/0152572 A1, May 14, 2020
Int. Cl. H01L 23/528 (2006.01); H01L 23/522 (2006.01); H01L 29/20 (2006.01); H01L 29/417 (2006.01); H01L 29/423 (2006.01)
CPC H01L 23/5286 (2013.01) [H01L 23/5226 (2013.01); H01L 29/2003 (2013.01); H01L 29/41725 (2013.01); H01L 29/42316 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An electronic device, comprising:
a structural body including a substrate and a layer of gallium nitride on the substrate;
a source terminal, a drain terminal, and a gate terminal on top of and in contact with a top surface of the layer of gallium nitride;
a plurality of source metal strips coupled to the source terminal, the plurality of source metal strips including a first source metal strip and a second source metal strip;
a plurality of drain metal strips coupled to the drain terminal, the plurality of drain metal strips including a first drain metal strip and a second drain metal strip, the first drain metal strip being between the first and second source metal strips, the first drain metal strip having a first end spaced from a second end along a first direction, the first end of the first drain metal strip being aligned with a central region of the first source metal strip along a second direction that is transverse to the first direction;
a trapezoidal source metal bus on the plurality of source metal strips and on the plurality of drain metal strips; and
a trapezoidal drain metal bus spaced from the source metal bus, the drain metal bus being on the plurality of source metal strips and on the plurality of drain metal strips;
an insulating layer that separates the source metal bus from the drain metal bus:
a first conductive pad electrically coupled to the source metal bus; and
a second conductive pad electrically coupled to the drain metal bus.