US 11,854,846 B2
System for a semiconductor fabrication facility and method for operating the same
Fu-Hsien Li, Taichung (TW); Sheng-Kang Yu, Hsinchu (TW); Chi-Feng Tung, Miaoli County (TW); Hsiang Yin Shen, Hsinchu (TW); and Guancyun Li, Miaoli County (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on Jun. 29, 2022, as Appl. No. 17/809,582.
Application 17/809,582 is a continuation of application No. 17/134,211, filed on Dec. 25, 2020, granted, now 11,380,566.
Application 17/134,211 is a continuation of application No. 16/703,518, filed on Dec. 4, 2019, granted, now 10,879,093, issued on Dec. 29, 2020.
Application 16/703,518 is a continuation of application No. 15/636,157, filed on Jun. 28, 2017, granted, now 10,504,760, issued on Dec. 10, 2019.
Prior Publication US 2022/0328331 A1, Oct. 13, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G05B 19/19 (2006.01); G05B 19/4061 (2006.01); H01L 21/67 (2006.01); B66C 17/26 (2006.01); B66C 15/00 (2006.01); B66C 13/16 (2006.01); B66C 13/18 (2006.01); H01L 21/677 (2006.01); G03F 7/00 (2006.01)
CPC H01L 21/67265 (2013.01) [B66C 13/16 (2013.01); B66C 13/18 (2013.01); B66C 15/00 (2013.01); B66C 17/26 (2013.01); G03F 7/70033 (2013.01); G03F 7/7075 (2013.01); G03F 7/7085 (2013.01); G03F 7/70533 (2013.01); G03F 7/70741 (2013.01); G03F 7/70975 (2013.01); G03F 7/70991 (2013.01); G05B 19/19 (2013.01); G05B 19/4061 (2013.01); H01L 21/67259 (2013.01); H01L 21/67706 (2013.01); H01L 21/67721 (2013.01); H01L 21/67724 (2013.01); H01L 21/67733 (2013.01); H01L 21/67736 (2013.01); G05B 2219/40292 (2013.01); G05B 2219/45031 (2013.01)] 20 Claims
OG exemplary drawing
 
8. A method for operating a system for a semiconductor fabrication facility, comprising:
providing a maintenance crane, an overhead hoisting transporting (OHT) vehicle, a control unit and a tool comprising a load port;
defining a danger zone overlapping the load port;
detecting a location of the maintenance crane and a location of the OHT vehicle;
prohibiting the maintenance crane from entering the danger zone when the OHT vehicle enters the danger zone;
sending signals from the control unit to a sensor on the OHT vehicle and a sensor on the load port; and
performing a handshaking function by the sensor on the OHT vehicle and the sensor on the load port to permit a load operation or an unload operation.