CPC H01L 21/02527 (2013.01) [B82B 3/0004 (2013.01); B82B 3/0057 (2013.01); H01L 22/14 (2013.01)] | 32 Claims |
1. A method for depositing an object, comprising:
an approach, of a comb in an enclosure, in the direction of a carrier substrate, the comb comprising at least two teeth, wherein a pair of adjacent teeth carries an object to be transferred, extended between the two teeth of the pair; then
a transfer, in the enclosure, of the object from the comb and to a deposit area of the carrier substrate while the deposit area is inserted between the two teeth of the pair; and
the transfer step is carried out while the inside of the enclosure is under vacuum at a pressure less than 10−6 bar.
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