US 11,854,801 B2
Method and device for depositing a nano-object
Matthieu Delbecq, Antony (FR); Tino Cubaynes, Heidelberg (FR); José Palomo, Argenteuil (FR); Matthieu Dartiailh, New York, NY (US); Takis Kontos, Paris (FR); and Matthieu Desjardins, Paris (FR)
Assigned to CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, Paris (FR); ECOLE NORMALE SUPERIEURE, Paris (FR); SORBONNE UNIVERSITE, Paris (FR); and UNIVERSITE DE PARIS, Paris (FR)
Appl. No. 17/285,369
Filed by CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, Paris (FR); ECOLE NORMALE SUPERIEURE, Paris (FR); SORBONNE UNIVERSITE, Paris (FR); and UNIVERSITE DE PARIS, Paris (FR)
PCT Filed Oct. 18, 2019, PCT No. PCT/EP2019/078380
§ 371(c)(1), (2) Date Apr. 14, 2021,
PCT Pub. No. WO2020/079228, PCT Pub. Date Apr. 23, 2020.
Claims priority of application No. 1859645 (FR), filed on Oct. 18, 2018.
Prior Publication US 2021/0375621 A1, Dec. 2, 2021
Int. Cl. H01L 21/02 (2006.01); B82B 3/00 (2006.01); H01L 21/66 (2006.01)
CPC H01L 21/02527 (2013.01) [B82B 3/0004 (2013.01); B82B 3/0057 (2013.01); H01L 22/14 (2013.01)] 32 Claims
OG exemplary drawing
 
1. A method for depositing an object, comprising:
an approach, of a comb in an enclosure, in the direction of a carrier substrate, the comb comprising at least two teeth, wherein a pair of adjacent teeth carries an object to be transferred, extended between the two teeth of the pair; then
a transfer, in the enclosure, of the object from the comb and to a deposit area of the carrier substrate while the deposit area is inserted between the two teeth of the pair; and
the transfer step is carried out while the inside of the enclosure is under vacuum at a pressure less than 10−6 bar.