US 11,852,656 B2
Probe head and probe card having same
Bum Mo Ahn, Suwon-si (KR); Seung Ho Park, Hwaseong-si (KR); and Tae Hwan Song, Cheonan-si (KR)
Assigned to POINT ENGINEERING CO., LTD.
Filed by POINT ENGINEERING CO., LTD., Asan-si (KR)
Filed on Mar. 26, 2021, as Appl. No. 17/214,785.
Claims priority of application No. 10-2020-0038878 (KR), filed on Mar. 31, 2020.
Prior Publication US 2021/0302472 A1, Sep. 30, 2021
Int. Cl. G01R 1/073 (2006.01)
CPC G01R 1/07342 (2013.01) 7 Claims
OG exemplary drawing
 
1. A probe head, comprising:
a guide plate on which a first guide hole is provided,
wherein a signal probe is inserted into the first guide hole,
wherein the guide plate includes a shield portion formed at a periphery of the first guide hole,
wherein the shield portion includes vertical formation portions formed in a longitudinal direction of the first guide hole and a horizontal formation portion formed in contact with the vertical formation portions,
wherein the vertical formation portions are separated from the first guide hole so that the shield portion is electrically insulated from the signal probe,
wherein the guide plate is formed of an anodic oxide film,
wherein the vertical formation portions are formed by filling pores of the anodic oxide film,
wherein the horizontal formation portion is configured to integrally contact the vertical formation portions, and
wherein the first guide hole is formed by etching the guide plate, and the pores are formed during forming the anodic oxide film.