US 11,852,650 B2
Dual-operating accelerometer
Francesco Rizzini, Passirano (IT); Nicolo' Manca, Turin (IT); and Cristian Dall'Oglio, Niscemi (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed on Feb. 18, 2022, as Appl. No. 17/675,501.
Prior Publication US 2023/0266356 A1, Aug. 24, 2023
Int. Cl. G01P 15/125 (2006.01); B81B 7/02 (2006.01); G01P 15/08 (2006.01); G01P 15/18 (2013.01)
CPC G01P 15/125 (2013.01) [B81B 7/02 (2013.01); G01P 15/18 (2013.01); B81B 2201/0235 (2013.01); G01P 2015/082 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An accelerometer, comprising:
a substrate having a surface;
a sensing mass overlying the surface of the substrate, the sensing mass configured to move in a direction extending along the surface of the substrate, the sensing mass having a mass between 12 and 13 microgram;
a plurality of electrodes on the surface of the substrate, the plurality of electrodes configured to be capacitively coupled to the sensing mass with an active capacitance between 250 and 450 femtofarad; and
a plurality of folded springs that couple the sensing mass to the substrate, the plurality of folded springs having a stiffness between 1.5 and 6.3 Newton/meter.