US 11,852,603 B2
Gas sensing method and gas sensing system
Jeng-Tzong Sheu, Hsinchu (TW); Hao-Hsuan Hsu, Taoyuan (TW); and Chih-Wei Chen, Taichung (TW)
Assigned to NATIONAL YANG MING CHIAO TUNG UNIVERSITY, Hsinchu (TW)
Filed by National Yang Ming Chiao Tung University, Hsinchu (TW)
Filed on Mar. 26, 2021, as Appl. No. 17/214,428.
Claims priority of application No. 109132370 (TW), filed on Sep. 18, 2020.
Prior Publication US 2022/0091061 A1, Mar. 24, 2022
Int. Cl. G01N 27/12 (2006.01); G01N 27/22 (2006.01)
CPC G01N 27/129 (2013.01) [G01N 2027/222 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A gas sensing method, comprising:
using a gas sensing device to sense a target gas, the gas sensing device comprising a device channel, a source and a drain at two ends of the device channel, a dielectric layer on the device channel, and a sensing material on the dielectric layer, the device channel comprising a self-heating region, the sensing material overlapping the self-heating region, the self-heating region producing a change in resistance according to a concentration of the target gas being absorbed by the sensing material of the gas sensing device; and
controlling a change in supply of current or voltage to the gas sensing device according to the change in resistance, so that the gas sensing device is maintained operating at a predetermined temperature for sensing the target gas.