US 11,852,599 B2
Image processing system
Nobuhiro Okai, Tokyo (JP); Naomasa Suzuki, Tokyo (JP); and Muneyuki Fukuda, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
Filed on Jul. 22, 2021, as Appl. No. 17/382,515.
Claims priority of application No. 2020-132779 (JP), filed on Aug. 5, 2020.
Prior Publication US 2022/0042936 A1, Feb. 10, 2022
Int. Cl. G01N 23/2251 (2018.01); G06T 7/62 (2017.01); G06T 7/50 (2017.01); G06N 3/04 (2023.01); H01J 37/22 (2006.01)
CPC G01N 23/2251 (2013.01) [G06N 3/04 (2013.01); G06T 7/50 (2017.01); G06T 7/62 (2017.01); H01J 37/222 (2013.01); G01N 2223/6116 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An image processing system that estimates a three-dimensional shape of a sample based on a measurement image of the sample acquired by a charged particle beam device, the image processing system comprising:
a storage unit that stores a detectable range of a detector detecting secondary particles generated from the sample when the charged particle beam device irradiates the sample with a charged particle beam;
a calculation unit that outputs a simulated image obtained by simulating images of one or more three-dimensional shape patterns acquired by the charged particle beam device in accordance with the detectable range;
a learner that learns a relationship between the one or more three-dimensional shape patterns and the simulated image; and
an output unit that outputs a three-dimensional shape of the sample obtained from the learner by inputting the measurement image to the learner.