CPC G01N 15/1429 (2013.01) [G01J 3/02 (2013.01); G01N 15/1012 (2013.01); G01N 21/64 (2013.01); G01N 2015/1006 (2013.01)] | 17 Claims |
1. A microparticle measurement spectrometer, comprising:
a spectroscopic element configured to disperse that light emitted from microparticles flowing through a flow path; and
a photoelectric conversion array that has a plurality of light receiving elements having different detection wavelength ranges, wherein
the photoelectric conversion array is configured to convert optical information obtained by the light receiving elements into electrical information, and
outputs of all channels of the photoelectric conversion array are uniform when light, with which an amount of light per unit wavelength becomes same, is incident on the photoelectric conversion array.
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