US 11,852,126 B2
Cryopump system, and control device and regeneration method for cryopump system
Shuhei Gotanda, Tokyo (JP); and Kakeru Takahashi, Tokyo (JP)
Assigned to SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo (JP)
Filed by SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo (JP)
Filed on Mar. 25, 2021, as Appl. No. 17/212,562.
Claims priority of application No. 2020-056300 (JP), filed on Mar. 26, 2020.
Prior Publication US 2021/0301805 A1, Sep. 30, 2021
Int. Cl. F04B 37/08 (2006.01); F04B 41/06 (2006.01); F04B 49/22 (2006.01); F04B 49/06 (2006.01); F04D 19/04 (2006.01); F04D 27/00 (2006.01); F04B 49/00 (2006.01)
CPC F04B 37/085 (2013.01) [F04B 37/08 (2013.01); F04B 41/06 (2013.01); F04B 49/00 (2013.01); F04B 49/065 (2013.01); F04B 49/225 (2013.01); F04D 19/04 (2013.01); F04D 27/00 (2013.01); F04B 2205/04 (2013.01); F04B 2205/11 (2013.01); Y10S 417/901 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A cryopump system comprising:
a plurality of cryopumps, each cryopump comprising a rough valve connecting the cryopump to a common rough pump and a pressure sensor measuring a pressure in the cryopump; and
a controller that controls, for each of the plurality of cryopumps, the rough valve of the cryopump based on a measured pressure from the pressure sensor of the cryopump such that the cryopump is decompressed to a first reference pressure by the common rough pump and thereafter a vacuum is maintained in the cryopump, and the cryopump is further decompressed to a second reference pressure lower than the first reference pressure by the common rough pump,
wherein the controller is configured to, based on the measured pressure from the pressure sensor of a first one of the cryopumps, open the rough valve of a second one of the cryopumps such that the second one of the cryopumps is decompressed to the first reference pressure while the vacuum is maintained in the first one of the cryopumps, and
wherein the controller is configured to compare the measured pressure from the pressure sensor of the first one of the cryopumps with the first reference pressure, and to open the rough valve of the second one of the cryopumps when the measured pressure falls below the first reference pressure.