US 11,851,743 B1
Metal nanoparticle fabrication on TCO for plasmonic interaction of photons
Nishikant Sonwalkar, Boston, MA (US)
Assigned to SunDensity, Inc., Boston, MA (US)
Filed by SunDensity, Inc., Boston, MA (US)
Filed on Jul. 24, 2023, as Appl. No. 18/357,334.
Claims priority of provisional application 63/399,313, filed on Aug. 19, 2022.
Int. Cl. H01L 31/055 (2014.01); C23C 14/08 (2006.01); C23C 14/14 (2006.01); C23C 14/56 (2006.01); C23C 14/58 (2006.01); H01L 31/048 (2014.01); C23C 14/34 (2006.01); H01L 31/18 (2006.01); B82Y 40/00 (2011.01); B82Y 20/00 (2011.01); C23C 14/02 (2006.01)
CPC C23C 14/086 (2013.01) [B82Y 20/00 (2013.01); B82Y 40/00 (2013.01); C23C 14/022 (2013.01); C23C 14/14 (2013.01); C23C 14/34 (2013.01); C23C 14/568 (2013.01); C23C 14/5846 (2013.01); H01L 31/048 (2013.01); H01L 31/186 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
depositing a seed layer of a transparent conductive oxide onto a substrate;
depositing a layer of a plasmonic metal onto the transparent conductive oxide layer;
and
forming nanoparticles from the deposited metal by:
transporting the substrate along a transport path;
as the substrate is moving, energizing one or more flash lamps disposed along the transport path to apply a plurality of light pulses that impart a dewetting energy to the deposited metal layer.