CPC B81C 1/00047 (2013.01) [B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0315 (2013.01); B81C 2203/0145 (2013.01)] | 17 Claims |
1. A method for sealing entries in a MEMS element, comprising the following steps:
providing a functional layer having a functional region;
producing a cavity underneath the functional region of the functional layer using a first entry outside of the functional region of the functional layer, at least a part of the first entry is a trench that extends circumferentially around at least a part of the cavity so that the first entry is arranged at multiple sides of the cavity;
sealing the first entry after the production of the cavity;
subsequent to the sealing of the first entry, producing a second entry to the cavity, outside of the functional region of the functional layer, wherein the second entry is located laterally to a single position of the cavity without extending circumferentially around the cavity, so that the second entry is entirely located laterally to only a single side of the cavity;
melting sealing material in a region of the second entry; and
cooling off the melted sealing material to seal the second entry.
|