US 11,851,289 B2
Conveyance system for transferring frame wafer
Hiroaki Nakamura, Tokyo (JP); Toshihiro Kawai, Tokyo (JP); Kosuke Sugiura, Tokyo (JP); Gengoro Ogura, Tokyo (JP); and Yasushi Taniyama, Tokyo (JP)
Assigned to Sinfonia Technology Co., Ltd., Tokyo (JP)
Appl. No. 17/788,647
Filed by Sinfonia Technology Co., Ltd., Tokyo (JP)
PCT Filed Sep. 23, 2020, PCT No. PCT/JP2020/035693
§ 371(c)(1), (2) Date Jun. 23, 2022,
PCT Pub. No. WO2021/131186, PCT Pub. Date Jul. 1, 2021.
Claims priority of application No. 2019-238136 (JP), filed on Dec. 27, 2019.
Prior Publication US 2023/0033168 A1, Feb. 2, 2023
Int. Cl. H01L 21/677 (2006.01); B65G 47/90 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC B65G 47/905 (2013.01) [H01L 21/677 (2013.01); H01L 21/67259 (2013.01); H01L 21/68707 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A conveyance system for transferring a frame wafer including a wafer and a frame configured to hold the wafer, the frame having a notch at one side with respect to a predetermined center line when viewed in a direction orthogonal to a surface of the wafer such that the frame is partially formed asymmetrically with respect to the predetermined center line, the conveyance system comprising:
a holder configured to hold the frame so that the frame extends in a predetermined virtual plane;
a first detector configured to detect, in a predetermined first region in the virtual plane, whether the notch is present in the frame held by the holder;
a second detector configured to detect, in a predetermined second region opposite to the first region across the center line in the virtual plane, whether the notch is present in the frame held by the holder; and
a controller,
wherein the controller is configured to determine a front and a back of the frame wafer based on whether the notch is detected by the first detector and whether the notch is detected by the second detector.