US 11,850,805 B2
Method for manufacturing PDMS device and PDMS device manufactured thereby
Taek Dong Chung, Seoul (KR); Young-Chang Joo, Seoul (KR); Jeong-Yun Sun, Seoul (KR); Seok Hee Han, Seoul (KR); Sung Il Kim, Seoul (KR); Hae-Ryung Lee, Seoul (KR); and Seung-Min Lim, Seoul (KR)
Assigned to SEOUL NATIONAL UNIVERSITY R & DB FOUNDATION, Seoul (KR)
Filed by SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION, Seoul (KR)
Filed on Jul. 1, 2021, as Appl. No. 17/365,105.
Claims priority of application No. 10-2020-0106660 (KR), filed on Aug. 25, 2020.
Prior Publication US 2022/0063211 A1, Mar. 3, 2022
Int. Cl. B29C 65/00 (2006.01); C08L 83/04 (2006.01); C08G 77/392 (2006.01); B29C 35/08 (2006.01); C08G 77/38 (2006.01); H01L 29/66 (2006.01)
CPC B29C 66/026 (2013.01) [B29C 35/0805 (2013.01); B29C 66/712 (2013.01); B29C 66/72 (2013.01); B29C 66/723 (2013.01); B29C 66/7316 (2013.01); C08G 77/38 (2013.01); C08G 77/392 (2013.01); C08L 83/04 (2013.01); B29C 2035/0827 (2013.01); C08L 2203/20 (2013.01); H01L 29/66136 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A method for manufacturing a PDMS device, the method comprising:
(a) preparing a first PDMS substrate and a second PDMS substrate at least one of which has a pattern formed thereon;
(b) introducing a hydroxyl group (—OH) on the surface of the first PDMS substrate and the surface of the second PDMS substrate;
(c) introducing a first thiol group (—SH) on the surface of the first PDMS substrate, and introducing an epoxide on the surface of the second PDMS substrate;
(d) bonding the first PDMS substrate and the second PDMS substrate to form a PDMS structure; and
(e) substituting the epoxide present on the surface of the pattern of the PDMS structure with a thiol group.