US 11,850,743 B2
Transport apparatus, semiconductor manufacturing apparatus, and transport method
Takehiro Shindo, Nirasaki (JP); and Toshiaki Kodama, Nirasaki (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed on Sep. 23, 2019, as Appl. No. 16/578,791.
Claims priority of application No. 2018-179397 (JP), filed on Sep. 25, 2018.
Prior Publication US 2020/0094399 A1, Mar. 26, 2020
Int. Cl. B25J 9/04 (2006.01); B25J 18/04 (2006.01); B25J 9/12 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01); B25J 11/00 (2006.01); B25J 9/10 (2006.01); B25J 9/00 (2006.01); B25J 13/08 (2006.01)
CPC B25J 9/042 (2013.01) [B25J 9/126 (2013.01); B25J 18/04 (2013.01); H01L 21/67196 (2013.01); H01L 21/67259 (2013.01); H01L 21/67742 (2013.01); H01L 21/67766 (2013.01); B25J 9/0021 (2013.01); B25J 9/102 (2013.01); B25J 11/0095 (2013.01); B25J 13/088 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A transport apparatus comprising:
an articulated arm including:
a first arm in which a drive motor is installed;
a second arm configured to be driven by the first arm;
a transmission configured to convert a rotation of the drive motor into a rotation of the second arm via a joint;
a first sensor configured to detect a first sensor value corresponding to a rotation angle of an input shaft of the transmission; and
a second sensor configured to detect a second sensor value corresponding to a rotation angle of the second arm; and
a controller configured to control the articulated arm,
wherein the controller is further configured to control the second arm to a target rotation angle based on the first sensor value and the second sensor value, and
wherein the controller is further configured to:
calculate a deviation of the input shaft of the transmission, a differential value of the deviation of the input shaft, and an integral value of the deviation of the input shaft using the first sensor value, and control the second arm to the target rotation angle based on the calculated deviation of the input shaft, the differential value of the deviation of the input shaft, and the integral value of the deviation of the input shaft;
perform switching from the first sensor value to the second sensor value depending on a predetermined switching threshold; and
calculate, after the performing switching, a deviation of the rotation angle of the second arm, a differential value of the deviation of the rotation angle of the second arm, and an integral value of the deviation of the rotation angle of the second arm using the second sensor value, and control the second arm to the target rotation angle based on the calculated deviation of the rotation angle of the second arm, the differential value of the deviation of the rotation angle of the second arm, and the integral value of the deviation of the rotation angle of the second arm.