Method of forming retaining ring with shaped surface
Hung Chih Chen, Sunnyvale, CA (US); Steven M. Zuniga, Soquel, CA (US); Charles C. Garretson, Monterey, CA (US); Douglas R. McAllister, Pleasanton, CA (US); Jian Lin, Milpitas, CA (US); Stacy Meyer, San Jose, CA (US); Sidney P. Huey, Fremont, CA (US); Jeonghoon Oh, Saratoga, CA (US); Trung T. Doan, Baoshan Hsinchu (TW); Jeffrey P. Schmidt, San Jose, CA (US); Martin S. Wohlert, San Jose, CA (US); Kerry F. Hughes, San Jose, CA (US); James C. Wang, Saratoga, CA (US); Danny Cam Toan Lu, San Francisco, CA (US); Romain Beau De Lamenie, Menlo Park, CA (US); Venkata R. Balagani, Gilroy, CA (US); Aden Martin Allen, Austin, TX (US); and Michael Jon Fong, Mill Valley, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Feb. 9, 2023, as Appl. No. 18/167,007.
Application 18/167,007 is a division of application No. 17/590,764, filed on Feb. 1, 2022, granted, now 11,577,361.
Application 17/590,764 is a division of application No. 17/011,952, filed on Sep. 3, 2020, granted, now 11,260,500, issued on Mar. 1, 2022.
Application 17/011,952 is a division of application No. 15/908,605, filed on Feb. 28, 2018, granted, now 10,766,117, issued on Sep. 8, 2020.
Application 15/908,605 is a division of application No. 14/927,193, filed on Oct. 29, 2015, granted, now 9,937,601, issued on Apr. 10, 2018.
Application 14/927,193 is a division of application No. 14/069,207, filed on Oct. 31, 2013, granted, now 9,186,773, issued on Nov. 17, 2015.
Application 14/069,207 is a division of application No. 13/305,589, filed on Nov. 28, 2011, granted, now 8,585,468, issued on Nov. 19, 2013.
Application 13/305,589 is a division of application No. 13/089,174, filed on Apr. 18, 2011, granted, now 8,066,551, issued on Nov. 29, 2011.
Application 13/089,174 is a division of application No. 12/049,650, filed on Mar. 17, 2008, granted, now 7,927,190, issued on Apr. 19, 2011.
Application 12/049,650 is a continuation of application No. 10/988,211, filed on Nov. 12, 2004, granted, now 7,344,434, issued on Mar. 18, 2008.
Claims priority of provisional application 60/603,068, filed on Aug. 19, 2004.
Claims priority of provisional application 60/580,759, filed on Jun. 17, 2004.
Claims priority of provisional application 60/580,758, filed on Jun. 17, 2004.
Claims priority of provisional application 60/556,569, filed on Mar. 26, 2004.
Claims priority of provisional application 60/520,555, filed on Nov. 13, 2003.
Prior Publication US 2023/0182261 A1, Jun. 15, 2023
1. A method of forming a surface profile on a bottom surface of a retaining ring, comprising:
holding a bottom surface of an annular retaining ring in contact with a generally planar polishing surface in a first machine for removing material from the retaining ring; and
creating non-rotational motion between the bottom surface and the polishing surface to wear the bottom surface until the bottom surface reaches target geometry corresponding to an equilibrium geometry resulting from breaking-in the annular retaining ring in a second machine for substrate polishing.
