US 11,850,623 B2
Substrate treating apparatus and substrate transporting method
Yuichi Takayama, Kyoto (JP); Kazuhiko Nakazawa, Kyoto (JP); Hiromichi Kaba, Kyoto (JP); Toshihito Morioka, Kyoto (JP); Takuya Sato, Kyoto (JP); and Noriyuki Kikumoto, Kyoto (JP)
Assigned to SCREEN Holdings Co., Ltd.
Filed by SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed on Sep. 8, 2020, as Appl. No. 17/014,036.
Claims priority of application No. 2019-171512 (JP), filed on Sep. 20, 2019.
Prior Publication US 2021/0086222 A1, Mar. 25, 2021
Int. Cl. B05C 13/00 (2006.01); B25B 11/00 (2006.01); H01L 21/683 (2006.01)
CPC B05C 13/00 (2013.01) [B25B 11/005 (2013.01); H01L 21/683 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A substrate treating apparatus, comprising:
a first transport mechanism configured to transport a substrate,
the first transport mechanism including:
a hand; and
a hand driving unit configured to move the hand,
the hand including:
a base;
a suction portion attached to the base, configured to flow gas along a top face of the substrate, and to suck the substrate upward without contacting the substrate;
a first receiver supported on the base and disposed below the substrate sucked by the suction portion without contacting the substrate sucked by the suction portion, and capable of receiving at least either a back face of the substrate or an edge of the substrate;
a second receiver supported on the base and disposed below the substrate sucked by the suction portion without contacting the substrate sucked by the suction portion, and capable of receiving at least either the back face of the substrate or the edge of the substrate in an approached position in which the second receiver has approached the first receiver; and
a receiver driving unit configured to cause the second receiver to move with respect to the base so that the second receiver approaches the first receiver into said approached position, and moves away from the first receiver; wherein
the first receiver and the second receiver allow the substrate to move upward with respect to the first receiver and the second receiver in a state where the second receiver is in said approached position with respect to the first receiver.