US 11,850,416 B2
Method of manufacturing a probe array
Khalil Najafi, Ann Arbor, MI (US); Seyed Amin Sandoughsaz Zardini, Ann Arbor, MI (US); and Daniel Egert, San Francisco, CA (US)
Assigned to The Regents of the University of Michigan, Ann Arbor, MI (US)
Filed by The Regents of the University of Michigan, Ann Arbor, MI (US)
Filed on Jun. 21, 2019, as Appl. No. 16/449,012.
Claims priority of provisional application 62/688,800, filed on Jun. 22, 2018.
Prior Publication US 2019/0388678 A1, Dec. 26, 2019
Int. Cl. A61N 1/05 (2006.01); A61B 5/00 (2006.01)
CPC A61N 1/0529 (2013.01) [A61B 5/685 (2013.01); A61B 2562/125 (2013.01); A61B 2562/168 (2013.01); Y10T 29/49002 (2015.01)] 27 Claims
OG exemplary drawing
 
9. A method of manufacturing a probe array for electrophysiological recording/stimulation, comprising steps of:
etching a plurality of substrates to form a plurality of body segment channels;
at least partially aligning the plurality of body segment channels in each substrate of the plurality of substrates to form a plurality of axial trenches, wherein at least some of the body segment channels are at least partially overlapping;
at least partially filling the axial trenches with one or more layers of probe material to form one or more probes with multiple recording/stimulation sites; and
separating the probes from the plurality of substrates.