US 11,844,172 B2
System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources
John Szilagyi, San Jose, CA (US); and Ilya Bezel, Mountain View, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Oct. 16, 2019, as Appl. No. 16/654,230.
Prior Publication US 2021/0120659 A1, Apr. 22, 2021
Int. Cl. H05H 1/46 (2006.01); H05G 2/00 (2006.01); C01B 13/10 (2006.01); H01J 65/04 (2006.01)
CPC H05H 1/46 (2013.01) [C01B 13/10 (2013.01); H01J 65/04 (2013.01); H05G 2/008 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A system comprising:
a gas containment vessel configured to contain a gas;
one or more pump sources configured to generate one or more pump beams for sustaining a plasma within the gas containment vessel, wherein the one or more pump sources comprise one or more lasers; and
an ozone generation unit including one or more illumination sources, wherein the one or more illumination sources are configured to generate a beam of illumination of an energy sufficient for converting a portion of diatomic oxygen (O2) contained within the gas containment vessel to triatomic oxygen (O3),
wherein one or more energy sources are configured to ignite the plasma within the gas contained within the gas containment vessel via absorption of energy of the one or more energy sources by a portion of the triatomic oxygen, wherein the plasma emits broadband radiation.