US 11,843,300 B2
Linear motor, transport apparatus, and production apparatus
Masaharu Naka, Chiba (JP); Norihiro Suzuki, Kanagawa (JP); and Satoru Deguchi, Kanagawa (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by Canon Kabushiki Kaisha, Tokyo (JP)
Filed on Dec. 11, 2020, as Appl. No. 17/119,209.
Application 17/119,209 is a continuation of application No. PCT/JP2019/023109, filed on Jun. 11, 2019.
Claims priority of application No. 2018-112135 (JP), filed on Jun. 12, 2018; and application No. 2019-107411 (JP), filed on Jun. 7, 2019.
Prior Publication US 2021/0099067 A1, Apr. 1, 2021
Int. Cl. H02K 41/03 (2006.01); H02P 6/00 (2016.01); H02K 7/06 (2006.01)
CPC H02K 41/031 (2013.01) [H02K 7/06 (2013.01); H02P 6/006 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A production apparatus comprising:
a stator including a core and a plurality of coils that are arranged along a first direction, at least one of the plurality of coils being configured to excite the core;
a movable element including a permanent magnet and configured to be movable along the first direction; and
a chamber,
wherein the core includes an excitation unit wound with each of the coils and an acting unit configured to be magnetically coupled to the excitation unit and cause a magnetic flux applied from the excitation unit to work on the permanent magnet of the movable element,
wherein the excitation unit is arranged to be spaced apart from the acting unit,
wherein the plurality of coils and the excitation unit are arranged outside the chamber, and
wherein the acting unit is arranged inside the chamber.