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US 11,843,087 B2 |
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Vertical solid-state transducers and high voltage solid-state transducers having buried contacts and associated systems and methods |
Vladimir Odnoblyudov, Eagle, ID (US); and Martin F. Schubert, Mountain View, CA (US) |
Assigned to Micron Technology, Inc., Boise, ID (US) |
Filed by Micron Technology, Inc., Boise, ID (US) |
Filed on Jan. 19, 2023, as Appl. No. 18/156,994. |
Application 14/850,715 is a division of application No. 14/607,839, filed on Jan. 28, 2015, granted, now 9,159,896, issued on Oct. 13, 2015. |
Application 14/607,839 is a division of application No. 13/708,526, filed on Dec. 7, 2012, granted, now 8,963,121, issued on Feb. 24, 2015. |
Application 18/156,994 is a continuation of application No. 17/132,546, filed on Dec. 23, 2020, granted, now 11,563,158. |
Application 17/132,546 is a continuation of application No. 16/669,785, filed on Oct. 31, 2019, granted, now 10,879,444, issued on Dec. 29, 2020. |
Application 16/669,785 is a continuation of application No. 16/167,280, filed on Oct. 22, 2018, granted, now 10,475,976, issued on Nov. 12, 2019. |
Application 16/167,280 is a continuation of application No. 15/658,202, filed on Jul. 24, 2017, granted, now 10,134,969, issued on Nov. 20, 2018. |
Application 15/658,202 is a continuation of application No. 15/019,748, filed on Feb. 9, 2016, granted, now 9,728,696, issued on Aug. 8, 2017. |
Application 15/019,748 is a continuation of application No. 14/850,715, filed on Sep. 10, 2015, granted, now 9,293,639, issued on Mar. 22, 2016. |
Prior Publication US 2023/0163266 A1, May 25, 2023 |
This patent is subject to a terminal disclaimer. |
Int. Cl. H01L 33/62 (2010.01); H01L 21/78 (2006.01); H01L 27/15 (2006.01); H01L 33/38 (2010.01); H01L 27/04 (2006.01); H01L 33/00 (2010.01); H01L 33/06 (2010.01); H01L 33/32 (2010.01); H01L 33/40 (2010.01); H01L 33/64 (2010.01); H01L 25/075 (2006.01); H01L 33/58 (2010.01) |