US 11,843,018 B2
Solid-state imaging device and electronic apparatus
Sozo Yokogawa, Kanagawa (JP)
Assigned to Sony Semiconductor Solutions Corporation, Kanagawa (JP)
Appl. No. 16/640,939
Filed by SONY SEMICONDUCTOR SOLUTIONS CORPORATION, Kanagawa (JP)
PCT Filed Jul. 13, 2018, PCT No. PCT/JP2018/026604
§ 371(c)(1), (2) Date Feb. 21, 2020,
PCT Pub. No. WO2019/044213, PCT Pub. Date Mar. 7, 2019.
Claims priority of application No. 2017-168260 (JP), filed on Sep. 1, 2017.
Prior Publication US 2020/0227467 A1, Jul. 16, 2020
Int. Cl. H01L 31/0236 (2006.01); H01L 27/146 (2006.01); G02B 1/11 (2015.01)
CPC H01L 27/14645 (2013.01) [G02B 1/11 (2013.01); H01L 27/14612 (2013.01); H01L 27/14621 (2013.01); H01L 27/14625 (2013.01); H01L 27/14623 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A light detecting device, comprising:
a first unit of pixels including first photoelectric conversion regions in a semiconductor substrate and a first color filter, wherein the first color filter is configured to transmit light in a first wavelength range;
a second unit of pixels including second photoelectric conversion regions in the semiconductor substrate and a second color filter, wherein the second color filter is configured to transmit light in a second wavelength range; and
a third unit of pixels including third photoelectric conversion regions in the semiconductor substrate and a third color filter, wherein the third color filter is configured to transmit light in a third wavelength range,
wherein the first unit of pixels is adjacent to the second unit of pixels and the third unit of pixels,
wherein an antireflective layer of the second unit of pixels is a single-layer film having a thickness corresponding to a quarter of the second wavelength range with a planar structure in a cross-sectional view,
wherein an antireflective layer of the third unit of pixels has a concave structure in the cross-sectional view, and
wherein the antireflective layers of the second unit of pixels and the third unit of pixels are disposed between a respective color filter and a respective photoelectric conversion region.