US 11,842,914 B2
Composite sintered body, electrostatic chuck member, and electrostatic chuck device
Nobuhiro Hidaka, Tokyo (JP); and Hironori Kugimoto, Tokyo (JP)
Assigned to SUMITOMO OSAKA CEMENT CO., LTD., Tokyo (JP)
Appl. No. 16/480,264
Filed by SUMITOMO OSAKA CEMENT CO., LTD., Tokyo (JP)
PCT Filed Feb. 19, 2018, PCT No. PCT/JP2018/005719
§ 371(c)(1), (2) Date Jul. 23, 2019,
PCT Pub. No. WO2018/155374, PCT Pub. Date Aug. 30, 2018.
Claims priority of application No. 2017-032622 (JP), filed on Feb. 23, 2017; and application No. 2017-032623 (JP), filed on Feb. 23, 2017.
Prior Publication US 2019/0385884 A1, Dec. 19, 2019
Int. Cl. H01L 21/683 (2006.01); C04B 35/103 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/6833 (2013.01) [C04B 35/103 (2013.01); H01J 37/32724 (2013.01); H01L 21/67103 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3826 (2013.01); C04B 2235/785 (2013.01); C04B 2235/786 (2013.01); C04B 2235/85 (2013.01); C04B 2235/9669 (2013.01); H01J 2237/002 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A composite sintered body which is a ceramic composite sintered body, the composite sintered body comprising:
aluminum oxide which is a main phase;
silicon carbide which is a sub-phase;
at least one crystal grain of the silicon carbide, which is located between at least two crystal grains of the aluminum oxide; and
an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at a grain boundary between the crystal grain of the aluminum oxide and the crystal grain of the silicon carbide.