CPC G01N 29/09 (2013.01) [G01N 29/041 (2013.01); G01N 29/2437 (2013.01); G01N 2291/018 (2013.01); G01N 2291/023 (2013.01)] | 18 Claims |
1. A shear-type vibration-ultrasonic composite sensor, comprising:
a metal matching layer, which comprises an insulating layer arranged on a lower surface and a supporting pillar arranged on an upper surface and is in contact with a to-be-detected object via the insulating layer;
a first normal piezoelectric element, which comprises a first negative electrode face clung to the upper surface and a first positive electrode face opposite to the first negative electrode face;
a second normal piezoelectric element, which comprises a second positive electrode face clung to the first positive electrode face via a conductive adhesive and a second negative electrode face opposite to the second positive electrode face, the first positive electrode face and the second positive electrode face being jointly connected with an ultrasonic signal output interface to output an ultrasonic signal;
a backing block, which has a first surface clung to the second negative electrode face and a second surface opposite to the first surface, the second surface being provided with a metal housing;
a vibrating base, which is in detachable connection with the supporting pillar;
a first tangential piezoelectric element, which has a first negative electrode surface attached to one side of the vibrating base and a first positive electrode surface opposite to the first negative electrode surface, the first positive electrode surface being attached to a first mass block; and
a second tangential piezoelectric element, which has a second negative electrode surface attached to the other side of the vibrating base opposite to the one side and a second positive electrode surface opposite to the second negative electrode surface, the second positive electrode surface being attached to a second mass block, the first mass block and the second mass block being respectively connected with a vibration signal output interface to output a vibration signal.
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