US 11,841,228 B2
Drive and sense balanced, fully-coupled 3-axis gyroscope
Doruk Senkal, San Jose, CA (US); Robert Hennessy, San Jose, CA (US); Houri Johari-Galle, San Jose, CA (US); and Joe Seeger, Menlo Park, CA (US)
Assigned to INVENSENSE, INC., San Jose, CA (US)
Filed by INVENSENSE, INC., San Jose, CA (US)
Filed on Sep. 3, 2021, as Appl. No. 17/467,145.
Application 17/467,145 is a continuation of application No. 16/138,637, filed on Sep. 21, 2018, granted, now 11,118,907.
Prior Publication US 2021/0396519 A1, Dec. 23, 2021
Int. Cl. G01C 19/5712 (2012.01); G01C 19/5783 (2012.01)
CPC G01C 19/5712 (2013.01) [G01C 19/5783 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A microelectromechanical systems (MEMS) device, comprising:
at least one inner frame gyroscope configured to sense a first component of angular velocity associated with the MEMS device around a first axis;
an outer frame gyroscope flexibly coupled to the at least one inner frame gyroscope and configured to sense a second component of angular velocity associated with the MEMS device around a second axis that is orthogonal to the first axis;
two outer frame lever arms associated with the outer frame gyroscope and configured to force the outer frame gyroscope into oscillation; and
at least two drive shuttles coupled to the outer frame gyroscope and configured to force at least one of the at least one inner frame gyroscope or the outer frame gyroscope into oscillation.