US 11,839,944 B2
Floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method
Wule Zhu, Hangzhou (CN); Fang Han, Hangzhou (CN); Lu Wu, Hangzhou (CN); Anyu Sun, Hangzhou (CN); and Bingfeng Ju, Hangzhou (CN)
Assigned to ZHEJIANG UNIVERSITY, Hangzhou (CN)
Filed by ZHEJIANG UNIVERSITY, Hangzhou (CN)
Filed on Aug. 18, 2022, as Appl. No. 17/891,015.
Application 17/891,015 is a continuation of application No. PCT/CN2022/085965, filed on Apr. 8, 2022.
Prior Publication US 2023/0029755 A1, Feb. 2, 2023
Int. Cl. B24B 1/04 (2006.01); B24B 41/04 (2006.01); B24B 35/00 (2006.01); B06B 3/02 (2006.01); B24B 13/01 (2006.01)
CPC B24B 13/012 (2013.01) [B06B 3/02 (2013.01); B24B 1/04 (2013.01); B24B 35/00 (2013.01); B24B 41/04 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A floating non-contact ultrasonic enhanced flexible sub-aperture polishing device comprising:
a flexible tool (101);
an amplitude transformer (102);
an ultrasonic transducer (103);
a conductive ring rotor (104);
a conductive ring stator (105);
a connecting shaft (106);
a shaft coupling (107);
a ball spline nut (108);
a ball spline shaft (109);
two axial restraint shaft sleeves (110);
wherein the ball spline nut (108) is fixed in a ventilation main shaft (201) through a first flange, the ball spline shaft (109) is extending through the ball spline nut (108); the two axial restraint shaft sleeves (110) are respectively set at two ends of the ball spline nut (108) in interference connection with the ball spline shaft (109); one end of the shaft coupling (107) is in interference connection with the ball spline shaft (109), the other end of the shaft coupling (107) is fixedly connected with one end of the connecting shaft (106); the other end of the connecting shaft (106) is extending through the conductive ring stator (105); the conductive ring rotor (104) is fixedly connected with the connecting shaft (106); the conductive ring stator (105) is fixed on an axial moving platform through a rotation stop sheet; the connecting shaft (106) is in interference connection with an end portion of the ultrasonic transducer (103); the ultrasonic transducer (103) is connected with the amplitude transformer (102) via a second flange; the flexible tool (101) is fixed with an output end of the amplitude transformer (102); the conductive ring stator (105) is coupled with the conductive ring rotor (104) through an electric brush; a positive end and a negative end of a transducer power of the ultrasonic transducer are respectively coupled with two terminals of the conductive ring rotor (104).