US 11,839,453 B2
Soft capacitive pressure sensors
Michelle Khine, Irvine, CA (US); Joshua Kim, Irvine, CA (US); Gregory Washington, Irvine, CA (US); Theron Frederick Lee Smith, Irvine, CA (US); Floranne Tavailau Ellington, Irvine, CA (US); and Joseph Garcia, Irvine, CA (US)
Assigned to THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, Oakland, CA (US)
Filed by THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, Oakland, CA (US)
Filed on Nov. 8, 2019, as Appl. No. 16/678,626.
Application 16/678,626 is a continuation in part of application No. 15/474,937, filed on Mar. 30, 2017, granted, now 10,898,084.
Claims priority of provisional application 62/875,418, filed on Jul. 17, 2019.
Claims priority of provisional application 62/757,329, filed on Nov. 8, 2018.
Claims priority of provisional application 62/316,375, filed on Mar. 31, 2016.
Prior Publication US 2020/0069193 A1, Mar. 5, 2020
Int. Cl. A61B 5/022 (2006.01)
CPC A61B 5/022 (2013.01) [A61B 2562/0247 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A capacitive pressure sensor (100) comprising:
a. a first electrode layer (110);
b. a second electrode layer (120);
c. a dielectric layer (130) disposed on the first electrode layer (110) such that the dielectric layer (130) is between the first and second electrode layers (110, 120);
d. a plurality of elastic structures (125) projecting from the second electrode layer (120) toward the dielectric layer (130) and first electrode layer (110), wherein the plurality of elastic structures (125) creates an air gap (140) that separates the first electrode layer (110) and the second electrode layer (120); and
e. a conductive metallic film (124) disposed between the plurality of elastic structures (125);
wherein when the sensor (100) is in a resting configuration, the air gap (140) is disposed between the first electrode layer (110) and the second electrode layer (120), wherein the air gap (140) functions as a second dielectric layer, wherein when the sensor (100) is compressed, the first electrode layer (110) and the second electrode layer (120) are brought closer to each other, thereby reducing a height of the air gap and increasing a pressure sensitivity and capacitance of the sensor.