US 12,494,767 B2
Vibration device and method for manufacturing vibration device
Koji Kitahara, Ina (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Mar. 3, 2022, as Appl. No. 17/685,434.
Claims priority of application No. 2021-034183 (JP), filed on Mar. 4, 2021.
Prior Publication US 2022/0286107 A1, Sep. 8, 2022
Int. Cl. H03H 9/10 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/19 (2006.01)
CPC H03H 9/1021 (2013.01) [H03H 3/02 (2013.01); H03H 9/02102 (2013.01); H03H 9/02133 (2013.01); H03H 9/19 (2013.01); H03H 2003/022 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A vibration device comprising:
a base having a first surface and a second surface that is in a front-back relationship with the first surface;
a vibrator disposed at the first surface; and
a lid having a first recess that opens toward the first surface, a third surface that is a bottom surface of the first recess, and a fourth surface that is in a front-back relationship with the third surface, the lid being so bonded to the first surface that the vibrator is encapsulated in the first recess,
wherein the lid has a second recess that is part of the third surface recessed toward the fourth surface and includes a diaphragm formed of a bottom surface of the second recess and the fourth surface, and
the diaphragm is configured to displace due to changes in an internal pressure in a space in which the vibrator is sealed.