US 12,493,307 B2
Fast switching gas circuits and processing chambers, and related methods and apparatus, for gas stabilization
Enle Choo, Saratoga, CA (US); Martin Truemper, Austin, TX (US); Shu-Kwan Lau, Sunnyvale, CA (US); and Jason Jewell, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 10, 2023, as Appl. No. 18/484,057.
Claims priority of provisional application 63/533,819, filed on Aug. 21, 2023.
Prior Publication US 2025/0066915 A1, Feb. 27, 2025
Int. Cl. G05D 11/13 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); G05D 7/06 (2006.01)
CPC G05D 11/132 (2013.01) [C23C 16/45561 (2013.01); C23C 16/52 (2013.01); G05D 7/0635 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A gas circuit, comprising
one or more first flow controllers operable to flow a first gas;
one or more second flow controllers operable to flow a second gas; and
one or more valve assemblies, comprising:
a first supply line connected to a respective first flow controller;
a second supply line connected to a respective second flow controller; and
a plurality of valves operable to open and close the respective flow of the first gas and the second gas received from the one or more first flow controllers and the one or more second flow controllers, wherein the one or more valve assemblies further comprise a vent line and the one or more valve assemblies are connected, respectively, between one or more gas lines on one side and the one or more first flow controllers and the one or more second flow controllers on another side, wherein the plurality of valves comprise:
a first valve operable to flow the first gas to the one or more gas lines when open; and
a first vent valve operable to flow the first gas to the vent line when open, and when the first valve is closed.